Stress-dependent prediction of metastable phase formation for magnetron-sputtered V1−xAlxN and Ti1−xAlxN thin films
Liu, Sida; Chang, Keke (Corresponding author); Music, Denis; Chen, Xiang; Mráz, Stanislav; Bogdanovski, Dimitri; Hans, Marcus; Primetzhofer, Daniel; Schneider, Jochen M.
Amsterdam [u.a.] : Elsevier Science (2020)
Journal Article
In: Acta materialia
Volume: 196
Page(s)/Article-Nr.: 313-324
Identifier
- DOI: 10.1016/j.actamat.2020.06.044
- RWTH PUBLICATIONS: RWTH-2020-09024