Toward decoupling the effects of kinetic and potential ion energies: Ion flux dependent structural properties of thin (V,Al)N films deposited by pulsed filtered cathodic arc Editor’s Pick

Unutulmazsoy, Yeliz (Corresponding author); Kalanov, Dmitry; Oh, Kyunghwan; Karimi Aghda, Soheil; Gerlach, Jürgen W.; Braun, Nils; Munnik, Frans; Lotnyk, Andriy; Schneider, Jochen M.; Anders, André

New York, NY : American Institute of Physics (2023)
Contribution to a book, Journal Article

In: Journal of vacuum science & technology : JVST / A
Volume: 41
Issue: 6
Page(s)/Article-Nr.: 063106

Institutions

  • Division of Materials Science and Engineering [520000]
  • Chair of Materials Chemistry [521110]

Identifier

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