An in situ ToF-LEIS characterization of the surface of Ti-based thin films under oxygen exposure and at elevated temperatures

Wolf, Philipp M. (Corresponding author); Neuß, Deborah; Tran, Tuan T.; Pitthan, Eduardo; Hans, Marcus; Schneider, Jochen M.; Primetzhofer, Daniel

Amsterdam : Elsevier (2023)
Journal Article

In: Applied surface science
Volume: 638
Page(s)/Article-Nr.: 158076


  • Division of Materials Science and Engineering [520000]
  • Chair of Materials Chemistry [521110]