Ion kinetic energy- and ion flux-dependent mechanical properties and thermal stability of (Ti,Al)N thin films

Karimi Aghda, Soheil (Corresponding author); Holzapfel, Damian Mauritius; Music, Denis; Unutulmazsoy, Yeliz; Mráz, Stanislav; Bogdanovski, Dimitri; Fidanboy, Gönenç; Hans, Marcus; Primetzhofer, Daniel; Méndez, Alba San José; Anders, André; Schneider, Jochen M.

Amsterdam [u.a.] : Elsevier Science (2023)
Journal Article

In: Acta materialia
Volume: 250
Page(s)/Article-Nr.: 118864


  • Division of Materials Science and Engineering [520000]
  • Chair of Materials Chemistry [521110]