Ab initio-guided X-ray photoelectron spectroscopy quantification of Ti vacancies in Ti$_{1− δ}$O$_{x}$N$_{1−x}$ thin films

Ondračka, Pavel (Corresponding author); Hans, Marcus; Holzapfel, Damian Mauritius; Primetzhofer, Daniel; Holec, David; Schneider, Jochen M.

Amsterdam [u.a.] : Elsevier Science (2022)
Journal Article

In: Acta materialia
Volume: 230
Page(s)/Article-Nr.: 117778


  • Division of Materials Science and Engineering [520000]
  • Chair of Materials Chemistry [521110]