Unravelling the ion-energy-dependent structure evolution and its implications for the elastic properties of (V,Al)N thin films

Karimi Aghda, Soheil (Corresponding author); Music, Denis; Unutulmazsoy, Yeliz; Sua, Heng Han; Mráz, Stanislav; Hans, Marcus; Primetzhofer, Daniel; Anders, André; Schneider, Jochen M.

Amsterdam [u.a.] : Elsevier Science (2021)
Journal Article

In: Acta materialia
Volume: 214
Page(s)/Article-Nr.: 117003


  • Division of Materials Science and Engineering [520000]
  • Chair of Materials Chemistry [521110]