Stress-dependent prediction of metastable phase formation for magnetron-sputtered V1−xAlxN and Ti1−xAlxN thin films

Liu, Sida; Chang, Keke (Corresponding author); Music, Denis; Chen, Xiang; Mráz, Stanislav; Bogdanovski, Dimitri; Hans, Marcus; Primetzhofer, Daniel; Schneider, Jochen M.

Amsterdam [u.a.] : Elsevier Science (2020)
Journal Article

In: Acta materialia
Volume: 196
Page(s)/Article-Nr.: 313-324


  • Division of Materials Science and Engineering [520000]
  • Chair of Materials Chemistry [521110]