Metal-ion subplantation : A game changer for controlling nanostructure and phase formation during film growth by physical vapor deposition

Greczynski, Grzegorz (Corresponding author); Mráz, Stanislav; Schneider, Jochen M.; Hultman, L.

Melville, NY : American Inst. of Physics (2020)
Journal Article

In: Journal of applied physics
Volume: 127
Issue: 18
Page(s)/Article-Nr.: 180901

Institutions

  • Division of Materials Science and Engineering [520000]
  • Chair of Materials Chemistry [521110]

Identifier

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