Electric field strength-dependent accuracy of TiAlN thin film composition measurements by laser-assisted atom probe tomography
Hans, Marcus (Corresponding author); Schneider, Jochen M.
Bad Honnef] : Dt. Physikalische Ges. (2020)
Journal Article
In: New journal of physics
Volume: 22
Page(s)/Article-Nr.: 033036
Identifier
- DOI: 10.1088/1367-2630/ab7770
- DOI: 10.18154/RWTH-2020-03683
- RWTH PUBLICATIONS: RWTH-2020-03683