Autonomously Self-Reporting Hard Coatings: Tracking the Temporal Oxidation Behavior of TiN by In Situ Sheet Resistance Measurements

Stelzer, Bastian (Corresponding author); Momma, Markus; Schneider, Jochen M.

Weinheim : Wiley-VCH (2020)
Journal Article

In: Advanced functional materials
Volume: 30
Issue: 13
Page(s)/Article-Nr.: 2000146

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