Angular resolved mass-energy analysis of species emitted from a dc magnetron sputtered NiW-target

Rausch, Martin (Corresponding author); Mráz, Stanislav; Kreiml, Patrice; Cordill, Megan J.; Schneider, Jochen M.; Winkler, Jörg; Mitterer, Christian

New York, NY : American Institute of Physics (2020)
Contribution to a book, Journal Article

In: Journal of vacuum science & technology : JVST / A
Volume: 38
Issue: 2
Page(s)/Article-Nr.: 023401