Ion energy control via the electrical asymmetry effect to tune coating properties in reactive radio frequency sputtering

Ries, Stefan (Corresponding author); Banko, Lars; Hans, Marcus; Primetzhofer, Daniel; Schneider, Jochen M.; Ludwig, Alfred; Awakowicz, Peter; Schulze, Julian

Bristol : IOP Publ. (2019)
Contribution to a book, Journal Article

In: Plasma sources science and technology
Volume: 28
Issue: 11
Page(s)/Article-Nr.: 114001