On the chemical composition of TiAlN thin films : Comparison of ion beam analysis and laser-assisted atom probe tomography with varying laser pulse energy

Hans, Marcus (Corresponding author); Schneider, Jochen M.

Amsterdam [u.a.] : Elsevier (2019)
Contribution to a book, Journal Article

In: Thin solid films
Volume: 688
Page(s)/Article-Nr.: 137251