Correlative Experimental and Theoretical Investigation of the Angle-Resolved Composition Evolution of Thin Films Sputtered from a Compound Mo2BC Target

Achenbach, Jan-Ole (Corresponding author); Mráz, Stanislav; Primetzhofer, Daniel; Schneider, Jochen M.

Basel : MDPI (2019)
Contribution to a book, Journal Article

In: Coatings : open access journal
Volume: 9
Issue: 3
Page(s)/Article-Nr.: 206