Control over the Phase Formation in Metastable Transition Metal Nitride Thin Films by Tuning the Al+ Subplantation Depth

Greczynski, Grzegorz (Corresponding author); Mráz, Stanislav; Hans, Marcus; Lu, Jun; Hultman, Lars; Schneider, Jochen M.

Basel : MDPI (2019)
Contribution to a book, Journal Article

In: Coatings : open access journal
Volume: 9
Issue: 1
Page(s)/Article-Nr.: 17-28

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