Modeling of metastable phase formation for sputtered Ti1-xAlxN thin films

Liu, Sida; Chang, Keke (Corresponding author); Mráz, Stanislav; Chen, Xiang; Hans, Marcus; Music, Denis; Primetzhofer, Daniel; Schneider, Jochen M.

Amsterdam [u.a.] : Elsevier Science (2018, 2019)
Journal Article

In: Acta materialia
Volume: 165
Page(s)/Article-Nr.: 615-625


  • Division of Materials Science and Engineering [520000]
  • Chair of Materials Chemistry [521110]