Modeling of metastable phase formation for sputtered Ti1-xAlxN thin films
Liu, Sida; Chang, Keke (Corresponding author); Mráz, Stanislav; Chen, Xiang; Hans, Marcus; Music, Denis; Primetzhofer, Daniel; Schneider, Jochen M.
Amsterdam [u.a.] : Elsevier Science (2018, 2019)
Journal Article
In: Acta materialia
Volume: 165
Page(s)/Article-Nr.: 615-625
Identifier
- DOI: 10.1016/j.actamat.2018.12.004
- RWTH PUBLICATIONS: RWTH-2018-231917