Spatially resolved characterization of a dc magnetron plasma using optical emission spectroscopy

Ries, Stefan (Corresponding author); Bibinov, Nikita; Rudolph, Marcel; Schulze, Julian; Mráz, Stanislav; Schneider, Jochen M.; Awakowicz, Peter

Bristol : IOP Publ. (2018)
Contribution to a book, Journal Article

In: Plasma sources science and technology
Volume: 27
Issue: 9
Page(s)/Article-Nr.: 094001


  • Division of Materials Science and Engineering [520000]
  • Chair of Materials Chemistry [521110]