Combined experimental and theoretical description of direct current magnetron sputtering of Al by Ar and Ar/N 2 plasma

Trieschmann, Jan (Corresponding author); Ries, Stefan; Bibinov, Nikita; Awakowicz, Peter; Mráz, Stanislav; Schneider, Jochen M.; Mussenbrock, Thomas

Bristol : IOP Publ. (2018)
Contribution to a book, Journal Article

In: Plasma sources science and technology
Volume: 27
Issue: 5
Page(s)/Article-Nr.: 054003

Identifier