Substantial difference in target surface chemistry between reactive dc and high power impulse magnetron sputtering

Greczynski, Grzegorz (Corresponding author); Mráz, Stanislav; Schneider, Jochen M.; Hultman, L.

Bristol : IOP Publ. (2018)
Journal Article (Letter)

In: Journal of physics / D
Volume: 51
Issue: 5
Page(s)/Article-Nr.: 05LT01

Identifier