Selectable phase formation in VAlN thin films by controlling Al+ subplantation depth

Greczynski, Grzegorz (Corresponding author); Mráz, Stanislav; Hultman, L.; Schneider, Jochen M.

London] : Macmillan Publishers Limited, part of Springer Nature (2017)
Journal Article

In: Scientific reports
Volume: 7
Page(s)/Article-Nr.: 17544