HPPMS deposition from composite targets: Effect of two orders of magnitude target power density changes on the composition of sputtered Cr-Al-C thin films

Rueß, Holger (Corresponding author); to Baben, Moritz; Mráz, Stanislav; Shang, Lin; Polcik, P.; Kolozsvári, S.; Hans, Marcus; Primetzhofer, D.; Schneider, Jochen M.

Amsterdam [u.a.] : Elsevier Science (2017)
Journal Article

In: Vacuum : surface engineering, surface instrumentation & vacuum technology
Volume: 145
Page(s)/Article-Nr.: 285-289