Unprecedented Al supersaturation in single-phase rock salt structure VAlN films by Al+ subplantation

Greczynski, Grzegorz (Corresponding author); Mráz, Stanislav; Hans, Marcus; Primetzhofer, D.; Lu, J.; Hultman, L.; Schneider, Jochen M.

Melville, NY : American Inst. of Physics (2017)
Journal Article

In: Journal of applied physics
Volume: 121
Issue: 17
Page(s)/Article-Nr.: 171907

Identifier