Modeling of metastable phase formation diagrams for sputtered thin films
Chang, Keke (Corresponding author); Music, Denis; to Baben, Moritz; Lange, Dennis; Bolvardi, Hamid; Schneider, Jochen M.
Abingdon : Taylor & Francis (2016)
Journal Article
In: Science and technology of advanced materials : STAM
Volume: 17
Issue: 1
Page(s)/Article-Nr.: 210-219
Identifier
- DOI: 10.1080/14686996.2016.1167572
- DOI: 10.18154/RWTH-2016-09827
- RWTH PUBLICATIONS: RWTH-2016-09827