Modeling of metastable phase formation diagrams for sputtered thin films

Chang, Keke (Corresponding author); Music, Denis; to Baben, Moritz; Lange, Dennis; Bolvardi, Hamid; Schneider, Jochen M.

Abingdon : Taylor & Francis (2016)
Journal Article

In: Science and technology of advanced materials : STAM
Volume: 17
Issue: 1
Page(s)/Article-Nr.: 210-219