Unintentional carbide formation evidenced during high-vacuum magnetron sputtering of transition metal nitride thin films

Greczynski, Grzegorz (Corresponding author); Mráz, Stanislav; Hultman, L.; Schneider, Jochen M.

Amsterdam : Elsevier (2016)
Journal Article

In: Applied surface science
Volume: 385
Page(s)/Article-Nr.: 356-359

Identifier