Venting temperature determines surface chemistry of magnetron sputtered TiN films

Greczynski, Grzegorz; Mráz, Stanislav; Hultman, L.; Schneider, Jochen M.

Melville, NY : American Inst. of Physics (2016)
Journal Article

In: Applied physics letters
Volume: 108
Issue: 4
Page(s)/Article-Nr.: 041603

Abstract