Atomistic growth phenomena of reactively sputtered RuO2 and MnO2 thin films

Music, Denis (Corresponding author); Bliem, Pascal; Geyer, Richard W.; Schneider, Jochen M.

Melville, NY : American Inst. of Physics (2015)
Journal Article

In: Journal of applied physics
Volume: 118
Issue: 1
Page(s)/Article-Nr.: 015302


  • Division of Materials Science and Engineering [520000]
  • Chair of Materials Chemistry [521110]