Effect of Si additions on thermal stability and the phase transition sequence of sputtered amorphous alumina thin films

Bolvardi, H.; to Baben, Moritz; Nahif, F.; Music, Denis (Corresponding author); Schnabel, V.; Shaha, K. P.; Mráz, Stanislav; Bednarcik, J.; Michalikova, J.; Schneider, Jochen M.

Melville, NY : American Inst. of Physics (2015)
Journal Article

In: Journal of applied physics
Volume: 117
Issue: 2
Page(s)/Article-Nr.: 025302