Effect of oxygen incorporation on the structure and elasticity of Ti-Al-O-N coatings synthesized by cathodic arc and high power pulsed magnetron sputtering

Hans, Marcus (Corresponding author); to Baben, Moritz; Music, Denis; Ebenhöch, Janina; Primetzhofer, D.; Kurapov, Denis; Arndt, Mirjam; Rudigier, Helmut; Schneider, Jochen M.

Melville, NY : American Inst. of Physics (2014)
Journal Article

In: Journal of applied physics
Volume: 116
Issue: 9
Page(s)/Article-Nr.: 093515


  • Division of Materials Science and Engineering [520000]
  • Chair of Materials Chemistry [521110]