Synthesis of yttrium silicates by annealing r.f. sputtered glassy coatings
Zhang, Jie; Mráz, Stanislav; Yao, Jiahao; Schneider, Jochen M.
Kidlington : Elsevier Science [u.a.] (2013)
Contribution to a book, Journal Article (ResearchPaper)
In: Vacuum
Volume: 101
Issue: SI
Page(s)/Article-Nr.: 382-386
Identifier
- DOI: 10.1016/j.vacuum.2013.10.017
- RWTH PUBLICATIONS: RWTH-CONV-090261