Synthesis of yttrium silicates by annealing r.f. sputtered glassy coatings

Zhang, Jie (Corresponding author); Mráz, Stanislav; Yao, Jiahao; Schneider, Jochen M.

Kidlington : Elsevier Science [u.a.] (2013)
Contribution to a book, Journal Article (ResearchPaper)

In: Vacuum
Volume: 101
Issue: SI
Page(s)/Article-Nr.: 382-386