Growth of V-Al-C thin films by direct current and high power impulse magnetron sputtering from a powder metallurgical composite target

Jiang, Yan; Mráz, Stanislav; Schneider, Jochen M.

Amsterdam : Elsevier [u.a.] (2013)
Contribution to a book, Journal Article

In: Thin solid films
Volume: 538
Page(s)/Article-Nr.: 1-6

Institutions

  • Division of Materials Science and Engineering [520000]
  • Chair of Materials Chemistry [521110]

Identifier