Growth of V-Al-C thin films by direct current and high power impulse magnetron sputtering from a powder metallurgical composite target
Jiang, Yan; Mráz, Stanislav; Schneider, Jochen M.
Amsterdam : Elsevier [u.a.] (2013)
Contribution to a book, Journal Article
In: Thin solid films
Volume: 538
Page(s)/Article-Nr.: 1-6
Identifier
- DOI: 10.1016/j.tsf.2012.09.021
- RWTH PUBLICATIONS: RWTH-CONV-086720