Surface chemistry of TiAlN and TiAlNO coatings deposited by means of high power pulsed magnetron sputtering

Gnoth, C.; Kunze, C.; Hans, Marcus; to Baben, Moritz; Emmerlich, J.; Schneider, Jochen M.; Grundmeier, G.

Bristol : IOP Publ. [u.a.] (2013)
Journal Article

In: Journal of physics / D, Applied physics
Volume: 46
Issue: 8
Page(s)/Article-Nr.: 084003

Identifier