Angle-resolved evolution of the composition of Cr-Al-C thin films deposited by sputtering of a compound target

Mráz, Stanislav (Corresponding author); Emmerlich, Jens; Weyand, Felix; Schneider, Jochen M.

Bristol : IOP Publ. [u.a.] (2013)
Journal Article

In: Journal of physics / D, Applied physics
Volume: 46
Issue: 13
Page(s)/Article-Nr.: 135501


  • Division of Materials Science and Engineering [520000]
  • Chair of Materials Chemistry [521110]