Structure evolution of magnetron sputtered TiO2 thin films

Mráz, Stanislav; Schneider, Jochen M.

Melville, NY : IOP Publ. (2011)
Journal Article

In: Journal of applied physics
Volume: 109
Issue: 2
Page(s)/Article-Nr.: 023512-6

Institutions

  • Division of Materials Science and Engineering [520000]
  • Chair of Materials Chemistry [521110]

Identifier