Origin of the nitrogen over- and understoichiometry in ti0.5al0.5n thin films
to Baben, Moritz; Raumann, Leonard; Music, Denis; Schneider, Jochen M.
Bristol : IOP Publ. (2012)
Journal Article
In: Journal of physics / Condensed matter
Volume: 24
Issue: 15
Page(s)/Article-Nr.: 155401
Identifier
- DOI: 10.1088/0953-8984/24/15/155401
- RWTH PUBLICATIONS: RWTH-CONV-070410