Origin of the nitrogen over- and understoichiometry in ti0.5al0.5n thin films

to Baben, Moritz; Raumann, Leonard; Music, Denis; Schneider, Jochen M.

Bristol : IOP Publ. (2012)
Journal Article

In: Journal of physics / Condensed matter
Volume: 24
Issue: 15
Page(s)/Article-Nr.: 155401