Charge state dependence of cathodic vacuum arc ion energy and velocity distributions

Rosén, Johanna; Schneider, Jochen M.; Anders, André

Melville, NY : AIP (2006)
Journal Article

In: Applied physics letters
Volume: 89
Issue: 14

Institutions

  • Chair of Materials Chemistry [521110]
  • Division of Materials Science and Engineering [520000]

Identifier