Composition-constitution-morphology relationship of Al2O3 thin films deposited by plasma assisted chemical vapor deposition

Snyders, Rony; Jiang, Kaiyun; Music, Denis; Konstantinidis, Stephanos; Markus, Torsten; Reinholdt, Alexander; Mayer, Joachim; Schneider, Jochen

Lausanne : Elsevier Sequoia (2009)
Journal Article

In: Surface & coatings technology
Volume: 204
Issue: 1/2
Page(s)/Article-Nr.: 215-221


  • Central Facility for Electron Microscopy [025000]
  • Chair of Microstructure Analysis [025010]
  • Department of Physics [130000]
  • Division of Materials Science and Engineering [520000]
  • Chair of Materials Chemistry [521110]