Pulsed plasma enhanced chemical vapor deposition of alumina thin films: Influence of the duty cycle on structure and elastic properties
Konstantinidis, Stephanos; Jiang, Kaiyun; Roobroek, Aline; Renaux, Fabian; Schneider, Jochen M.
Weinheim : Wiley (2011)
Journal Article
In: Plasma processes and polymers
Volume: 8
Issue: 7
Page(s)/Article-Nr.: 651-657
Identifier
- DOI: 10.1002/ppap.201000185
- RWTH PUBLICATIONS: RWTH-CONV-056019