Pulsed plasma enhanced chemical vapor deposition of alumina thin films: Influence of the duty cycle on structure and elastic properties

Konstantinidis, Stephanos; Jiang, Kaiyun; Roobroek, Aline; Renaux, Fabian; Schneider, Jochen M.

Weinheim : Wiley (2011)
Journal Article

In: Plasma processes and polymers
Volume: 8
Issue: 7
Page(s)/Article-Nr.: 651-657