Synthesis and mechanical properties of boron suboxide thin films

Music, Denis; Schneider, Jochen M.; Kugler, Veronika M.; Nakao, Setsuo; Jin, Ping; Östblom, Mattias; Hultman, Lars; Helmersson, Ulf

New York, NY : American Institute of Physics (2002)
Journal Article

In: Journal of vacuum science & technology / A, Vacuum, surfaces, & films
Volume: 20
Issue: 2
Page(s)/Article-Nr.: 335-337