The role of carbon in boron suboxide thin films

Music, Denis; Kugler, Veronika M.; Cigány, Zsolt; Flink, Axel; Werner, Oskar; Schneider, Jochen M.; Hultman, Lars; Helmersson, Ulf

New York, NY : American Institute of Physics (2003)
Journal Article

In: Journal of vacuum science & technology / A, Vacuum, surfaces, & films
Volume: 21
Issue: 4
Page(s)/Article-Nr.: 1355-1358


  • Chair of Materials Chemistry [521110]
  • Division of Materials Science and Engineering [520000]