Effect of ion energy on structure and composition of cathodic arc deposited alumina thin films

Rosén, Johanna; Mráz, Stanislav; Kreissig, Ulrich; Music, Denis; Schneider, Jochen M.

New York, NY : Plenum Publ. Corp. (2005)
Journal Article

In: Plasma chemistry and plasma processing
Volume: 25
Issue: 4
Page(s)/Article-Nr.: 303-317


  • Chair of Materials Chemistry [521110]
  • Division of Materials Science and Engineering [520000]