Synthesis and mechanical properties of BCN coatings deposited by PECVD

Kurapov, D.; Neuschütz, Dieter; Cremer, R.; Pedersen, T.; Wuttig, Matthias; Dietrich, D.; Marx, G.; Schneider, Jochen M.

Kidlington : Elsevier Science (2003)
Journal Article

In: Vacuum
Volume: 68
Issue: 4
Page(s)/Article-Nr.: 335-339