Synthesis and mechanical properties of BCN coatings deposited by PECVD

Kurapov, D.; Neuschütz, Dieter; Cremer, R.; Pedersen, T.; Wuttig, Matthias; Dietrich, D.; Marx, G.; Schneider, Jochen M.

Kidlington : Elsevier Science (2003)
Journal Article

In: Vacuum
Volume: 68
Issue: 4
Page(s)/Article-Nr.: 335-339


  • Chair of Experimental Physics I A and I. Institute of Physics [131110]
  • Chair of Materials Chemistry [521110]
  • Division of Materials Science and Engineering [520000]
  • Department of Physics [130000]