Reducing the impurity incorporation from residual gas by ion bombardment during high vacuum magnetron sputtering

Rosén, Johanna; Widenkvist, Erika; Larsson, Karin; Kreissig, Ulrich; Mráz, Stanislav; Martínez, Carlos; Music, Denis; Schneider, Jochen M.

Melville, N.Y : American Institute of Physics (2006)
Journal Article

In: Applied physics letters
Volume: 88
Issue: 19
Page(s)/Article-Nr.: 191905