Reducing the impurity incorporation from residual gas by ion bombardment during high vacuum magnetron sputtering
Rosén, Johanna; Widenkvist, Erika; Larsson, Karin; Kreissig, Ulrich; Mráz, Stanislav; Martínez, Carlos; Music, Denis; Schneider, Jochen M.
Melville, N.Y : American Institute of Physics (2006)
Journal Article
In: Applied physics letters
Volume: 88
Issue: 19
Page(s)/Article-Nr.: 191905
Identifier
- DOI: 10.1063/1.2193044
- RWTH PUBLICATIONS: RWTH-CONV-030913