Influence of the plasma chemistry on the composition of ZrOx and NbOx thin films deposited by reactive magnetron sputtering

Mráz, Stanislav; Schneider, Jochen M.

New York, NY : Plenum Publ. Corp. (2006)
Journal Article

In: Plasma chemistry and plasma processing
Volume: 26
Issue: 2
Page(s)/Article-Nr.: 197-203


  • Chair of Materials Chemistry [521110]
  • Division of Materials Science and Engineering [520000]