Energy distribution of O- ions during reactive magnetron sputtering

Mráz, Stanislav; Schneider, Jochen M.

Melville, N.Y : American Institute of Physics (2006)
Journal Article

In: Applied physics letters
Volume: 89
Issue: 5
Page(s)/Article-Nr.: 051502

Institutions

  • Chair of Materials Chemistry [521110]
  • Division of Materials Science and Engineering [520000]

Identifier