Structure, composition, mechanical, and tribological properties of BCN films deposited by plasma enhanced chemical vapor deposition
Kurapov, D.; Schneider, Jochen M.
New York, NY : Plenum Publ. Corp. (2005)
Journal Article
In: Plasma chemistry and plasma processing
Volume: 25
Issue: 6
Page(s)/Article-Nr.: 613-623
Identifier
- DOI: 10.1007/s11090-005-6816-x
- RWTH PUBLICATIONS: RWTH-CONV-030895