Structure, composition, mechanical, and tribological properties of BCN films deposited by plasma enhanced chemical vapor deposition

Kurapov, D.; Schneider, Jochen M.

New York, NY : Plenum Publ. Corp. (2005)
Journal Article

In: Plasma chemistry and plasma processing
Volume: 25
Issue: 6
Page(s)/Article-Nr.: 613-623


  • Chair of Materials Chemistry [521110]
  • Division of Materials Science and Engineering [520000]