Composition spread analysis of phase change dynamics in GexSByTe1-x-y films embedded in an optical multi-layer stack

Laurenzis, Martin; Heinrici, A.; Haring Bolívar, Peter; Kurz, Heinrich; Kyrsta, Stepan; Schneider, Jochen M.

London : IEE (2004)
Journal Article

In: IEE proceedings / Science, measurement & technology
Volume: 151
Issue: 6
Page(s)/Article-Nr.: 394-397

Institutions

  • Chair of Semiconductor Electronics and Institute of Semiconductor Electronics [616210]
  • Chair of Materials Chemistry [521110]
  • Division of Materials Science and Engineering [520000]

Identifier