On the phase formation of sputtered hafnium oxide and oxynitride films

Sarakinos, Kostas; Music, Denis; Mráz, Stanislav; to Baben, Moritz; Jiang, Kaiyun; Nahif, Farwah; Braun, Alexander; Zilkens, Conrad; Konstantinidis, Stephanos; Renaux, F.; Cossement, D.; Munnik, F.; Schneider, Jochen M.

Melville, NY : IOP Publ. (2010)
Journal Article

In: Journal of applied physics
Volume: 108
Issue: 1
Page(s)/Article-Nr.: 014904


  • Chair of Materials Chemistry [521110]
  • Division of Materials Science and Engineering [520000]