Low temperature synthesis of α-Al2O3 films by high-power plasma-assisted chemical vapour deposition
Jiang, Kaiyun; Sarakinos, Kostas; Konstantinidis, Stephanos; Schneider, Jochen M.
Bristol : IOP Publ. (2010)
Journal Article
In: Journal of physics / D, Applied physics
Volume: 43
Issue: 32
Page(s)/Article-Nr.: 325202
Identifier
- DOI: 10.1088/0022-3727/43/32/325202
- RWTH PUBLICATIONS: RWTH-CONV-015271