Low temperature synthesis of α-Al2O3 films by high-power plasma-assisted chemical vapour deposition

Jiang, Kaiyun; Sarakinos, Kostas; Konstantinidis, Stephanos; Schneider, Jochen M.

Bristol : IOP Publ. (2010)
Journal Article

In: Journal of physics / D, Applied physics
Volume: 43
Issue: 32
Page(s)/Article-Nr.: 325202