Ionized physical vapor deposited Al2O3 films: Does subplantation favor formation of α-Al2O3?

Sarakinos, Kostas; Music, Denis; Nahif, Farwah; Jiang, Kaiyun; Braun, Alexander; Zilkens, Conrad; Schneider, Jochen M.

Weinheim : Wiley-VCH (2010)
Journal Article

In: Physica status solidi / Rapid research letters
Volume: 4
Issue: 7
Page(s)/Article-Nr.: 154-156