Experiment and simulation of the compositional evolution of Ti-B thin films deposited by sputtering of a compound target
Neidhardt, Jörg; Mráz, Stanislav; Schneider, Jochen M.; Strub, Erik; Bohne, Wolfgang; Liedke, Bartosz; Möller, Wolfhard; Mitterer, Christian
Melville, NY : AIP (2008)
Journal Article
In: Journal of applied physics
Volume: 104
Issue: 6
Page(s)/Article-Nr.: 063304
Identifier
- DOI: 10.1063/1.2978211
- RWTH PUBLICATIONS: RWTH-CONV-013818