Experiment and simulation of the compositional evolution of Ti-B thin films deposited by sputtering of a compound target

Neidhardt, Jörg; Mráz, Stanislav; Schneider, Jochen M.; Strub, Erik; Bohne, Wolfgang; Liedke, Bartosz; Möller, Wolfhard; Mitterer, Christian

Melville, NY : AIP (2008)
Journal Article

In: Journal of applied physics
Volume: 104
Issue: 6
Page(s)/Article-Nr.: 063304

Identifier